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METHOD FOR FORMING INSULATING FILM

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专利名称:METHOD FOR FORMING INSULATING FILM发明人:TAKANO Yusuke,NAGAHARA

Tatsuro,NINAD Shinde,IWATA Takafumi

申请号:EP12746780.1申请日:20120217公开号:EP2677535A1公开日:20131225

摘要:Array

申请人:AZ Electronic Materials IP (Japan) K.K.

地址:Bunkyo Green Court, 28-8 Honkomagome 2-chome Bunkyo-ku Tokyo 113-0021JP

国籍:JP

代理机构:Rippel, Hans Christoph

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